Advisory Board Member
Maurus Tschirky
Maurus Tschirky is Senior Strategic Marketing Manager at Evatec. He is globally responsible for the market segment MEMS in terms of strategy and strategic project and customer acquisition. His genuine interest in advanced functional materials with piezoelectric and magnetic properties emphasize his dedication to the MEMS and Sensors market in particular. Maurus had a number of positions in the PVD-equipment industry (Balzers, Unaxis, Oerlikon and now Evatec) ranging from Application Engineer, System Engineer, Project Manager to Product Manager over the years and also spent 3 years leading a research section at CSEM in Neuchatel, Switzerland. He has a first Degree in Control Electronics from the University of Applied Sciences in Buchs, followed by a Masters in Business Engineering / International Marketing from the Hochschule für Wirtschaft und Technik in Zurich, Switzerland.
Evatec
Evatec delivers complete thin film deposition solutions in Advanced Packaging, Semiconductor, Optoelectronics and Photonics – from UBM /RDL processes in FOWLP and FOPLP applications, to deposition of high performance piezoelectrics like AlScN for 5G networks or NIR bandpass filters for 3D sensing, face and gesture recognition in our smart devices. We deliver tailored production solutions with batch, cluster or inline architecture according to your substrate format, throughput, process and fab integration requirements. Evatec’s Advanced Process Control (APC) technologies set new standards in deposition through ‘in situ” capability for control of film properties during the deposition cycle. Reduce your process development times, enhance repeatability and yields or increase tool throughput.
More Advisory Board Members
Co-Chair: Dr. Alex Gu
Chairman / Dean
MWS Advisory Board / School of Microelectronics
Co-Chair: Andrea Onetti
EVP MEMS Sensors Sub-Group Analog, MEMS and Sensors Group
STMicroelectronics
Co-Chair: Sandra Vos
R&D Director
NXP Semiconductors
Michael Siebert
Director Sales and Marketing
Afore Oy
Dr. Gerhard Lammel
Director System Architecture
Bosch Sensortec GmbH
Matthias Schulze
Head of Department Engineering
Fraunhofer Institute for Photonic Microsystems
Thomas Zarbock
Division Director MEMS Engineering, Manufacturing & Test
Fraunhofer Institute for Photonic Microsystems
Dr. Mark Wang
CEO
GMEMS Technologies, Inc
Zhijian Zhou
R&D Director
GoerTek Microelectronics Inc
Michelle Bourke
Strategic Marketing Director
Lam Research
June Shen
Managing Partner
Lotus Capital
Winfred Chen
Chief Hardware Architect of AIoT, Home Service Robot, Intelligent Innovation Centre
Midea Group
Dr. Mike Rosa
CMO & SVP Strategy
Onto Innovation
Dr. Mustafa Badaroglu
Principal Engineer/Architect (& IRDS More Moore Global Chair)
Qualcomm
Jessica Cao
Director of Marketing Strategy
Shanghai Industrial uTechnology Research Institute (SITRI)
Zewen Liu
Founder and Chairman
SiMEMS
Coralie Gallis
CTO
SM24
Dr. Mary Ann Maher
CEO
SoftMEMS
Dimitrios Damianos Ph.D.
Project Manager, Consulting Services Division
Yole Intelligence, part of Yole Group
Alex Gu
Coralie Gallis graduated as a PhD in Materials Sciences from Paris University and has an engineering degree in Physic-Chemistry. Coralie has worked for 20 years in the semiconductor field, holding various positions in different companies from software designer, Intelligent Specialist, Business Development and Strategic Partnerships. During her career, she developed the business for various domains such as BioMedical electronics, wearable electronics for healthcare, sport, wellness and Food industry. Since 2016, she is based in Silicon Valley, California and manages the Strategic Industrial Partnerships for the North American Market for CEAtech, a French technology research center.
Michelle M. Bourke received a B.Sc. degree in Optoelectronics and Laser Engineering from Heriot-Watt University, Edinburgh, Scotland, U.K., in 1993. Subsequently she joined the Defence Evaluation and Research Agency (DERA), where she worked on advanced processing methods for GaAs/AlGaAs optoelectronic devices. In 1997 Michelle moved to the semiconductor capital equipment industry as an etch process engineer. In 1999 she moved into Product Marketing where she has continued to develop her career. Today Michelle is with Lam Research Corporation as the Senior Strategic Marketing Director in the Customer Support Business Group.
Dr. Mary Ann Maher received her Ph.D. from Caltech in 1989 in the area of semiconductor device modeling. At Tanner Research she began the simulation and modeling group and launched Tanner’s T-Spice analog circuit simulator product. As Director of Advanced Products, she brought to market Tanner’s MEMS Pro microsystem and MCM Pro multi-chip module and packaging design tool. Moving to MEMSCAP, she became the company’s CTO and the General Manager and Executive Vice President of the Design Automation Business Unit. In 2004, she started SoftMEMS, LLC, the maker of the popular microsystems design tools – MEMS Pro and MEMS Xplorer, where she serves as CEO.
