MWS Webinar Topic

MWS 2022: Research Institute Update – Live Webinar

  • May 18, 2022
  • 8:00 AM (PST)
  • 1 hr 50mins

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Webinar Summary

(Agenda times in US PST time zone)

08:00 – 08:10
Welcome Address

08:15 – 08:35
Emerging MEMS technology trends
Presented by: Alissa Fitzgerald, CEO – am Fitzgerald
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08:40 – 09:00
Versatility vs. production: development centre never-ending struggle
Presented by: Irina Stateikina, Senior Scientist – MiQro Innovation Collaborative Centre (C2MI)
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09:05 – 09:25
Update on recent MEMS sensors and actuators developments at CEA-Leti
Presented by: Philippe Robert, Business Development Manager & Senior Expert, MEMS – CEA Leti
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09:30 – 09:50
Topic Miniature Sensor and Computing Technologies from VTT
Presented by: Tauno Vähä-Heikkilä, VP Microelectronics and Quantum Technology – VTT
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  • Alissa Fitzgerald
CEO – am Fitzgerald

Alissa M. Fitzgerald, Ph.D. is the CEO of A.M. Fitzgerald & Associates, LLC, which she founded in 2003. She has over 25 years of engineering experience in MEMS design, fabrication and product development. Having developed more than a dozen distinct MEMS devices, she now advises clients on the entire cycle of microelectronic product development, from business and IP strategy to supply chain and manufacturing operations. Prior to founding AMFitzgerald, Dr. Fitzgerald worked in engineering positions at the Jet Propulsion Laboratory, Orbital Sciences Corporation, Sigpro, and Sensant Corporation, now part of Siemens. She received her bachelor’s and master’s degrees from MIT and her Ph.D. from Stanford University in Aeronautics and Astronautics. Dr. Fitzgerald has numerous journal publications, holds nine patents, and is an author of the textbook “MEMS Product Development.” She is a member of the SEMI-MSIG standards committee and served as a board director on the MEMS Industry Group (MIG) Governing Council from 2008-2014. In 2013, she was inducted into the MIG Hall of Fame. She is currently a board director of Rigetti Computing and of the Transducer Research Foundation.

  • Topic: Emerging MEMS technology trends

An executive summary of the most noteworthy MEMS and sensor technologies emerging from the research world. Most of today’s blockbuster MEMS products originated from academic research, and we expect that pattern to continue. The criteria for noteworthiness are: offers a solution to a known or anticipated commercial market need, has a path to scalable manufacturing, and is a technology game-changer. Nearly all of the technologies to be presented will need many more years of intensive development and probably more than $100M in investment to reach full commercialization. Nevertheless, they each hold potential to create new waves of activity and opportunity in the MEMS and sensors industry.

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  • am Fitzgerald

A.M. Fitzgerald & Associates, LLC (“AMFitzgerald”) provides complete solutions for MEMS product development. Our full service engineering capabilities include: custom MEMS design to specification, semi-custom RocketMEMS® pressure sensors, process integration, prototype and short-run fabrication, multiphysics finite element modeling, foundry selection and transfer with support through production, and technology strategy consulting.

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  • Irina Stateikina
Senior Scientist – MiQro Innovation Collaborative Centre (C2MI)

Irina Stateikina is a senior scientist at C2MI specializing in MEMS fabrication process development and was a first MEMS integration professional in this company creating the base for a team of specialists joining the team in recent years. During seven years in her current position she contributed to an exceptional growth of the company’s portfolio. Building on her experience from 12 years of University teaching she still retains link with the academia as an Affiliate Assistance Professor at Concordia University. Her divers background in education, comprising Master of Engineering in the railroad automated systems as well as Master of Engineering and PhD in Electrical Engineering specializing in semiconductor physics and devices from Concordia University, Montreal, allowed her to implement this knowledge in design and fabrication of MEMS devices, such as optoelectronic waveguide and magnetic bio-sensors during her postdoctoral fellowship at INRS EMT. Her goal is to enable the advance of MEMS manufacturing through unique collaboration C2MI can offer connecting the start-up and well established companies with the academia and industry in C2MI’s network.

  • Topic: Versatility vs. production: development centre never-ending struggle

The goal of this talk is to illustrate how the premise of our centre, C2MI, creates diverse yet collaborative environment enabling well established companies as well as fresh out of university start-ups to achieve their goal. Our centre is equipped with the top of the line industrial scale tools allowing our customers to have not only a functioning prototype, but also a manufacturing process ready for scale-up, governed by a very simple IP policy. This applies to MEMS specialized customers as well as to companies who are interested in advanced packaging or printed electronics. Our environment comprises fully equipped 200 mm MEMS fab, Advanced Packaging and Card-attach department, Printed Electronics Division, and expansive metrology and reliability study laboratories. To illustrate the range of our model a couple of success examples will be discussed accentuating how some of the companies in C2MI network benefit from the collaborative environment.

  • MiQro Innovation Collaborative Centre (C2MI)

C2MI is the largest center for research and innovation in microelectronics in Canada. Offering state-of-the-art equipment dedicated mainly to advanced microchip encapsulation, microelectromechanical systems (MEMS) and printed electronics, the Center also brings together more than 250 scientists in research and development (R&D). The Center is a unique model of collaboration where the synergy between industrial and academic partners is necessary, even essential for the development of new generation products. C2MI is a Centre of excellence for commercialization and research (CECR) whose role is to help produce market-driven prototypes to accelerate their commercialization.

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  • Philippe Robert
Business Development Manager & Senior Expert, MEMS – CEA Leti

Philippe Robert is Business Development Manager & Senior Expert at CEA-Leti for the MEMS Sensors and Actuators activities.

After serving various positions in the sensor industry, he joined CEA-Leti in 2001 as project manager for RF-MEMS research and was promoted to manager of the MEMS Sensors Group from 2003 to 2013, and head of the Microsystems Department from 2013 to 2019.

He received a M.Sc. degree in optical electronic in 1991 and a Ph.D in electrical engineering in 1996 from Grenoble-INP, France. He has authored or co-authored about 40 journal papers and conference contributions, and holds more than 60 patents dealing with MEMS and NEMS. He was member of the IEEE-MEMS Technical Committee in 2007 and 2008 and of the International MEMS Industry Forum Committee at SEMI Europe 2014. Currently, he is member of the International Steering Committee of TRANSDUCERS conference, of the EUROSENSORS conference and of the MEMS & Imaging Sensors Summit.

  • Topic: Update on recent MEMS sensors and actuators developments at CEA-Leti

CEA-Leti has been working on MEMS technology since 1978 and has continuously innovated to become @now, one of the leading research institutes on MEMS sensors and actuators.

This presentation will briefly highlight the recent progress made by CEA-Leti on new MEMS sensors and actuators: 2D Piezoelectric Scanner, new architecture for high performance Piezoelectric Loudspeaker, Optomechanics for bio detection, Integrated Photo-Acoustic Gas Sensor, Navigation-grade gyroscope…

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  • Leti

𝐂𝐄𝐀-𝐋𝐞𝐭𝐢, 𝐚 𝐭𝐞𝐜𝐡𝐧𝐨𝐥𝐨𝐠𝐲 𝐫𝐞𝐬𝐞𝐚𝐫𝐜𝐡 𝐢𝐧𝐬𝐭𝐢𝐭𝐮𝐭𝐞, 𝐢𝐬 𝐚 𝐠𝐥𝐨𝐛𝐚𝐥 𝐥𝐞𝐚𝐝𝐞𝐫 𝐢𝐧 𝐦𝐢𝐧𝐢𝐚𝐭𝐮𝐫𝐢𝐳𝐚𝐭𝐢𝐨𝐧 𝐭𝐞𝐜𝐡𝐧𝐨𝐥𝐨𝐠𝐢𝐞𝐬 𝐞𝐧𝐚𝐛𝐥𝐢𝐧𝐠 𝐬𝐦𝐚𝐫𝐭, 𝐞𝐧𝐞𝐫𝐠𝐲-𝐞𝐟𝐟𝐢𝐜𝐢𝐞𝐧𝐭 𝐚𝐧𝐝 𝐬𝐞𝐜𝐮𝐫𝐞 𝐬𝐨𝐥𝐮𝐭𝐢𝐨𝐧𝐬 𝐟𝐨𝐫 𝐢𝐧𝐝𝐮𝐬𝐭𝐫𝐲. Founded in 1967, 𝐂𝐄𝐀-𝐋𝐞𝐭𝐢 𝐩𝐢𝐨𝐧𝐞𝐞𝐫𝐬 𝐦𝐢𝐜𝐫𝐨-& 𝐧𝐚𝐧𝐨𝐭𝐞𝐜𝐡𝐧𝐨𝐥𝐨𝐠𝐢𝐞𝐬, tailoring differentiating applicative solutions for global companies, SMEs and startups. CEA-Leti tackles critical challenges in healthcare, energy and digital migration. From sensors to data processing and computing solutions, CEA-Leti’s multidisciplinary teams deliver solid expertise, leveraging world-class pre-industrialization facilities. With a staff of more than 1,900, a portfolio of 3,100 patents, 10,000 sq. meters of cleanroom space and a clear IP policy, the institute is based in Grenoble, France, and has offices in Silicon Valley and Tokyo. CEA-Leti has launched 65 startups.


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  • Tauno Vähä-Heikkilä
VP Microelectronics and Quantum Technology – VTT

Dr. Tauno Vähä-Heikkilä is currently the Vice President of VTT’s Microelectronics and Quantum technology. He is also the Director of European Space Agency’s eternal laboratory MilliLab. Before his current position, he was the Vice President of VTT’s Connectivity research area. Tauno has also VTT level responsibility of VTT’s space activities. He has 20+ years of experience working with several industry segments including consumer, telecom infrastructure, industrial, space, aerospace and defense applications.

  • Topic: Miniature Sensor and Computing Technologies from VTT

Presentation covers latest developments at VTT related to miniaturization of photonics, sensing and quantum technologies. Many of sensors have been realized for industrial, space and other professional applications in past. Silicon based technologies allow miniaturization and mass production of these to be able to integrate them into consumer products.    

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  • VTT

We are a visionary research, development and innovation partner that drives sustainable growth and tackles the biggest global challenges of our time turning them into opportunities for business growth.

With over 80 years of experience in ground breaking research and science-based results, we go beyond the obvious to help society and companies grow through technological innovation.

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