Dr. Wei Zhao photo

Dr. Wei Zhao

  • Onto Innovation
  • Strategic Marketing Director
  • Biography

Wei began his career in advanced logic and gained hands-on fab process module and integration experience in both planar and FinFET logic technology where he served as a process engineer, integration leader and fab equipment strategist in support of semiconductor technology growth. With an ever-expanding knowledge of specialty device technologies as an equipment strategist, Wei has collaborated with fab process partners in specialty device segments to jointly develop equipment products that enable device performance growth. Here at Onto Innovation, he is focused on extending our company’s broad portfolio of metrology, inspection and lithography products to support the specialty device market, making semiconductor manufacturing greener, more productive and more innovative. Wei holds a B.S. and M.S. in Engineering Mechanics from the Dalian University of Technology and earned his Ph.D. in Mechanical Engineering at Stony Brook University.

  • Presentation
Process control solutions enabling high performance and efficient MEMS manufacturing

Onto Innovation is a leading supplier of metrology and inspection solutions for advanced semiconductor manufacturing. This presentation will highlight several use cases and key product technologies used to improve process control and enable high volume manufacturing of MEMS devices. Process control hardware/software solutions include film thickness, 3D geometry, overlay, inspection and closed loop software for increased RF filter device performance and yield; Inspection and process control in microphone manufacturing; and high throughput inspection of BiCMOS circuitry and MEMS in accelerometers and gyroscopes.

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  • Company Profile

Onto Innovation

Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that include: Unpatterned wafer quality; 3D metrology spanning chip features from nanometer scale transistors to large die interconnects; macro defect inspection of wafers and packages; metal interconnect composition; factory analytics; and lithography for advanced semiconductor packaging. Our breadth of offerings across the entire semiconductor value chain helps our customers solve their most difficult yield, device performance, quality, and reliability issues. Onto Innovation strives to optimize customers’ critical path of progress by making them smarter, faster and more efficient. Headquartered in Wilmington, Massachusetts, Onto Innovation supports customers with a worldwide sales and service organization.

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Website: www.ontoinnovation.com

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