Dr. Yuan Lu
Dr. Yuan Lu, manager technical marketing management at Evatec China. He participated in the project of BAW device research and development between Evatec and global RF-filter top companies. Besides, he was doing of the strategic marketing of MEMS state-owned company, including filter, IMU, temperature and gas MEMS project cooperation and investment. Currently his team is focusing on the solution and strategic marketing of business unit semiconductor, optoelectronics, photonics in Evatec China.
EVATEC – Thin Film Production Solutions for HeterogeneousIntegration
Heterogeneous Integration requires knowledge in functional layers within the dies, along with expertise in Advanced Packaging. Whereas the first part is genuinely core competence of Evatec for piezoelectric sensing or actuating elements, we also have a strong footprint in the AP court. The interdisciplinary approach is of the essence there, for instance in heat dissipation, magnetic shielding, or stress compensation. Mastering the 3rd dimension is also common for both MEMS and AP, where TSVs are elementary.
A variety of deposition technologies such as PVD, PECVD and PEALD on specific tool concepts (batch, single wafer or inline) enables the realization of interesting combinations. This is where Photonics, Optoelectronics, Semiconductors and Advanced Packaging come together – forming today’s MEMS devices.
Evatec AG
Evatec is your partner in thin film deposition platforms and processes across Advanced Packaging, Semiconductor, Optoelectronics and Photonics. Choose from “batch”, “cluster” and “inline” production solutions according to your process, throughput and fab integration requirements using systems capable of handling substrates up to 600x600mm. Within classical MEMS applications our process know how supports the deposition of Piezoelectrics, Magnetics and Photoresistors enabling a new generation of high performance devices whilst complimentary know how in deposition of stress compensation, heat dissipation barrier and other functional layers supports the increasing demand for heterogeneous integration of different functionalities in a chip.
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Coralie Gallis graduated as a PhD in Materials Sciences from Paris University and has an engineering degree in Physic-Chemistry. Coralie has worked for 20 years in the semiconductor field, holding various positions in different companies from software designer, Intelligent Specialist, Business Development and Strategic Partnerships. During her career, she developed the business for various domains such as BioMedical electronics, wearable electronics for healthcare, sport, wellness and Food industry. Since 2016, she is based in Silicon Valley, California and manages the Strategic Industrial Partnerships for the North American Market for CEAtech, a French technology research center.
Michelle M. Bourke received a B.Sc. degree in Optoelectronics and Laser Engineering from Heriot-Watt University, Edinburgh, Scotland, U.K., in 1993. Subsequently she joined the Defence Evaluation and Research Agency (DERA), where she worked on advanced processing methods for GaAs/AlGaAs optoelectronic devices. In 1997 Michelle moved to the semiconductor capital equipment industry as an etch process engineer. In 1999 she moved into Product Marketing where she has continued to develop her career. Today Michelle is with Lam Research Corporation as the Senior Strategic Marketing Director in the Customer Support Business Group.
Dr. Mary Ann Maher received her Ph.D. from Caltech in 1989 in the area of semiconductor device modeling. At Tanner Research she began the simulation and modeling group and launched Tanner’s T-Spice analog circuit simulator product. As Director of Advanced Products, she brought to market Tanner’s MEMS Pro microsystem and MCM Pro multi-chip module and packaging design tool. Moving to MEMSCAP, she became the company’s CTO and the General Manager and Executive Vice President of the Design Automation Business Unit. In 2004, she started SoftMEMS, LLC, the maker of the popular microsystems design tools – MEMS Pro and MEMS Xplorer, where she serves as CEO.
