Prof. Qi-Ze Zhong

Dr Qize Zhong joined Shanghai University as a professor in 2021. He worked as a postdoctoral fellow and Scientist at Nanyang Technological University and Institute of Microelectronics (IME), A*star in succession during the duration of 2015 to 2021 in Singapore. He is mainly engaged in the research of flat optics and advanced semiconductor processes, and has accumulated rich experience of optoelectronic chip design and process development. Starting from 2018, he joined as a core member of the team to develop the first 12-inch manufacturing process platform for the mass production of metasurface. This achievement has attracted the attention of top universities in European and American countries, also including several internationally renowned high-tech companies (Harvard University, Corning, AMAT, AMS, OSRAM, etc.). In terms of academics, Dr. Zhong has published over 50 academic papers, which have been cited more than 3,000 times, and additionally, 9 invention patents have been granted.

Toward Mass Production of Metasurfaces

Metasurface is composed of many sub-wavelength metastructures that can be fabricated in a flat surface using CMOS process. Light can be precisely controlled by a metasurface through the specifically designed shape and arrangement of meta-structures. This enables metasurfaces to realize same functions as conventional optical devices. In recent years, metasurface-based flat optic devices have attracted great attention since they are ultrathin, ultralight, mass-producible, and can be monolithically integrated with other optoelectronic devices. Ultraviolet photolithography based wafer-level fabrication has been considered as one of the most promising approaches for the mass-production of metasurface-based flat optic devices. In this talk, the fabrication progress we developed in wafer-level metasurface-based flat optics is introduced. Optical devices such as metalens, polarization bandpass filter, half-wave plate, and beam deflector are demonstrated on different types of wafers