Prof. Dr Zhenyu Wu photo
MWS China 2022 Speaker

Prof. Zhen-Yu Wu

  • Shanghai Institute of Microsystem and Information Technology (SIMIT), Chinese Academy of Sciences, Shanghai
  • Professor
  • Biography

Zhenyu Wu is Professor at the Shanghai Institute of Microsystem and Information Technology (SIMIT), Chinese Academy of Sciences, Shanghai, China. Before joining SIMIT, he was a Technology Engineer and Project Leader at the Sensor Technology Center, Robert Bosch GmbH, Germany. His Research Interest is the sensor and microsystem technology. He develops MEMS (Micro Electro Mechanical Systems) and MOEMS (Micro Optical Electrical Mechanical Systems) components and microsystems, covering the whole range of designing, modeling, simulation, process technology, packaging and characterization of sensor devices.

  • Presentation
Recent advances of MEMS Mirrors

In the past two decades, MEMS mirrors are already widely utilized in digital image projection, laser scanning, medical imaging and optical fiber communication. Nowadays, newly established applications — such as LiDAR, smart glasses, AR/VR — propose vast new demands on MEMS mirrors, which evolves to more diversified products. The recent advances of MEMS mirror technologies will be presented, various mirror devices that are being developed at SIMIT — as well as their performances — will be introduced in this presentation.

SIMIT logo
  • Company Profile

Shanghai Institute of Microsystem and Information Technology (SIMIT), Chinese Academy of Sciences, Shanghai

Profile coming soon…

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