
Mike Rosa
Mike Rosa is chief marketing officer (CMO) and senior vice president responsible for strategy at Onto Innovation. Prior to his current role, Mike served as CMO for Applied Materials ICAPS and Advanced Packaging Groups, where he was responsible for leadership of strategic and technical marketing, marketing communications, charting device segment inflection roadmaps and providing strategic business development support toward M&A activities. He has over 25 years’ experience in semiconductor engineering and technology, with roles that span device design and fabrication, equipment development, marketing and sales. His technical qualifications include B.Eng. (Hons) and Ph.D. degrees in Microelectronic Engineering and an MBA with dual majors in Marketing and Business Strategy. Mike has authored over 40 journal and conference publications and holds over 29 U.S. patents.
Meeting Challenges in MEMS with Advanced Metrology and Inspection Capabilities
Today, MEMS devices while continuing to maintain their novelty are for the most part no longer a new class of device technology – in fact the highest volume MEMS products IMUs, BAW/SAW filters, Microphones, Pressure Sensors, and Ink Jet devices are from a market entry perspective, considered mature. Despite this, they’re tirelessly evolving and continuing to bring new materials and unit process challenges. With each new design that leverages new materials or combinations of materials, together with increasingly challenging unit processes, the sophistication of the required metrology and inspection steps increases. This brief presentation will address a few of those challenges and explain the value that novel inspection and metrology capabilities can bring to both device manufacturers and equipment OEMs in characterizing their high-volume manufacturing processes and/or process development cycles. In doing so, optical critical dimension (OCD), infra-red (IR) inspection and acoustic metrology technologies will be highlighted in the context of IMU, Microphone, Piezo and finally bulk acoustic wave (BAW) filter device fabrication.

Onto Innovation
Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that include: Un-patterned wafer quality; 3D metrology spanning chip features from nanometer scale transistors to large die interconnects; macro defect inspection of wafers and packages; metal interconnect composition; factory analytics; and lithography for advanced semiconductor packaging. Our breadth of offerings across the entire semiconductor value chain combined with our connected thinking approach results in a unique perspective to help solve our customers’ most difficult yield, device performance, quality, and reliability issues. Onto Innovation strives to optimize customers’ critical path of progress by making them smarter, faster and more efficient. With headquarters and manufacturing in the U.S., Onto Innovation supports customers with a worldwide sales and service organization. Additional information can be found at www.ontoinnovation.com.
MWS EU 2022 Agenda
More MWS EU 2023 Speakers

Adrian Arcedera
SVP MEMS and Sensor Products
Amkor Technology, Inc.

Dr. Gunar Lorenz
Sr Director Technical Marketing and Application Engineering for Consumer Sensors
Infineon

Dr. Stefan Majoni
Director Foundry MEMS
Bosch

Pat Walsh
Managing Director NA/EU
AMEC

George Harris
VP Global Test Services
Amkor Technology, Inc.

Angeline Tee
Deputy Director Business Development
A*Star | IME

Maksym Plakhotnyuk, Ph.D.
Founder & CEO
ATLANT 3D

Alex Waldauf
Director Product Marketing Management
Cohu

Pierre Jallon
CTO
eLichens

Samira Nik
Programme Manager – Quantum Technologies and Electronics
European Innovation Council and SMEs Agency (EC EISMEA)

Maurus Tschirky
Senior Strategic Marketing Manager
Evatec AG

Dr. Sandro Koch
Group Manager Sensor Micro Modules
Fraunhofer IPMS

Dr. Michael Pate
Mobile Audio Systems, Algo, Architecture Lead
Google

Erwin Hijzen
Program Director MEMS Ultrasound
IMEC

Matan Naftali
CEO
Maradin

Thomas Russell
CEO and Co-Founder
Mesoline

Giuseppina Saracco
Sales Engineer Manager
Microtest

Senni Laaksonen
VP Research and Development
Murata

Eric Aguilar
CEO
Omnitron Sensors

Dr. David Leuenberger
Head of Product Management
Optotune

Giacomo Tonti
Sales Manager Semiconductor Division
OSAI

Jon Edwards
VP Business Development
PoLight ASA

Dr. Mohssen Moridi
Head of Research Division Microsystems
SAL

Matthieu Lacolle
CTO
sensiBel

Farrokh Ayazi
Founder & CEO
StethX Microsystems

Collin Twanow
Director, Technology
Teledyne

Moti Margalit
CEO
SonicEdge

Higor Batagin
Sales Manager Semi & MEMS Test Equipment
SPEA

Marco Pratillo
Sales Manager Semi & MEMS Test Equipment BU
SPEA

Anton Hofmeister
Group Vice President – General Manager R&D and Strategy
STMicroelectronics

Ahmed Ben Slimane
Managing Director
Strategic Semiconductors

Dr. Manuel Dorfmeister
Head of MEMS and e-Software department
TriLite

Dr. Koukou Suu
Executive Officer and Senior Fellow of ULVAC, Inc / President and CEO of ULVAC Technologies, Inc
ULVAC

Dimitrios Damianos
Project Manager, Consulting Services Division
Yole