MWS China 2021 Speaker
Dr. Yuan Lu
Dr. Yuan Lu is Technical Marketing Manager at Evatec. He is responsible for the Business Unit Semiconductor market strategy technical solutions in China. Dr. Lu is obtaining rich experience on magnetron sputtering and material physics as a material scientist, especially 5G filters, 3rd Generation compound semiconductor power device and piezoelectric MEMS. As technical marketing manager at Evatec, he joined several projects together with customer on technical decisions and mass production optimization. These expertise helps Evatec offering best technical know-how and mass-production experience.
Combine and Integrate – Advances in PVD for Piezoelectric Materials
To meet the requirement of piezo-MEMS for reaching higher stress and precision requirement, together with better electrical performance, the extreme limit has to be overcome by technical solution of high precision thin film growth. Evatec as a PVD solution provider, with the technical team with scientist and highly educated engineers, to cooperate with industrial customer to challenge the physical limit of plasma magnetron sputtering with new hardware and process.
The new platform CLN200E, with creative designed single process chamber, the higher precision, stress and electrical performance is already masted and the platform already is already introduced to global main players for mass production. Evatec wish to provide better device performance by our solution and shape the future.
Evatec
Evatec is a “Thin film Powerhouse”. As a global leader in thin film technology we design and manufacture production systems for industry, and our customized engineering solutions support the equipment needed at the worlds’ leading R&D institutions.
Alex Gu
Coralie Gallis graduated as a PhD in Materials Sciences from Paris University and has an engineering degree in Physic-Chemistry. Coralie has worked for 20 years in the semiconductor field, holding various positions in different companies from software designer, Intelligent Specialist, Business Development and Strategic Partnerships. During her career, she developed the business for various domains such as BioMedical electronics, wearable electronics for healthcare, sport, wellness and Food industry. Since 2016, she is based in Silicon Valley, California and manages the Strategic Industrial Partnerships for the North American Market for CEAtech, a French technology research center.
Michelle M. Bourke received a B.Sc. degree in Optoelectronics and Laser Engineering from Heriot-Watt University, Edinburgh, Scotland, U.K., in 1993. Subsequently she joined the Defence Evaluation and Research Agency (DERA), where she worked on advanced processing methods for GaAs/AlGaAs optoelectronic devices. In 1997 Michelle moved to the semiconductor capital equipment industry as an etch process engineer. In 1999 she moved into Product Marketing where she has continued to develop her career. Today Michelle is with Lam Research Corporation as the Senior Strategic Marketing Director in the Customer Support Business Group.
Dr. Mary Ann Maher received her Ph.D. from Caltech in 1989 in the area of semiconductor device modeling. At Tanner Research she began the simulation and modeling group and launched Tanner’s T-Spice analog circuit simulator product. As Director of Advanced Products, she brought to market Tanner’s MEMS Pro microsystem and MCM Pro multi-chip module and packaging design tool. Moving to MEMSCAP, she became the company’s CTO and the General Manager and Executive Vice President of the Design Automation Business Unit. In 2004, she started SoftMEMS, LLC, the maker of the popular microsystems design tools – MEMS Pro and MEMS Xplorer, where she serves as CEO.
