MWS China 2021 Speaker

Miao Zeng

  • Shanghai Industrial uTechnology Research Institute (SITRI)
  • SVP
  • Biography

Miao Zeng is currently SVP of Shanghai Industrial uTechnology Research Institute ( ; where he is responsible for their 8” MEMS R&D Fab. Previously, he was CEO at Silex Microsystems (Beijing) Ltd. since April 2018 ( Silex Microsystems is the world’s largest pure-play MEMS foundry, driving the sensory system revolution, partnering with the world’s most innovative companies to commercialize MEMS technologies that can change the world.

Prior to that, he was Vice President of Sales and Marketing at SJ Semiconductor Corporation – a semiconductor bumping / testing company – from August 2014-September 2017. As one of the initial organizers, he participated in the formation of this JV between SMIC and JCET, and was involved in drafting the business plan, team building, as well as site selections for the project. He was also involved in business development and enabled the company to become the first in China to be qualified for both 28nm and 14 nm technology products by a top international customer.

Miao was also the Director of Investment & Strategic Business Development at SMIC from July 2013-July 2014 where he was involved in outlining the long term strategy for the company and actively participating in various M&A activities. Other positions have included Associate Director, Customer Engineering at SMIC from June 2005-July 2007, Application & Customer Support Manager at ASML in the US from September 200-2002, Process Engineer at Photronics form June 1995-August 2000, and Manufacturing Support Engineer at Dupont Photomask from 1992-June 1995.

Miao had BS in Applied Physics, and graduated from Rochester Institute of Technology (RIT) with Master Degree in Microelectronics Engineering

  • Presentation

MEMS Process Technology Development – New Model

The presentation analyzes the current MEMS supply chain from device design to process development, and explores efficient ways of shorten the entire process and quickly transferring into mass production.

SITRI logo
  • Company Profile

Shanghai Industrial uTechnology Research Institute (SITRI)

Shanghai Industrial μTechnology Research Institute (SITRI) was established in 2013 by the Shanghai Science and Technology Commission, Jiading District Government and Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences. It is a new type of R & D institution converging R&D development, Engineering support and Productization. As the first R&D and technology industrialization platform in Shanghai, SITRI has the first 8-inch line in China. It is designated for the development of “More than Moore”, supporting open R & D project and other small to medium volume productions. By continuously learning from other world leading research Institutes, SITRI has developed its own novel business and operational models to facilitate global technology innovation.

SITRI has formed an international team of experts to provide other research entity or business partner with R&D development, long-term collaboration or even reliable one-stop solution in the fields of MEMS, AlN/Piezoelectric thin film process, silicon photonics, microfluidics, bio-photonics, magnetic sensing, and silicon-based Group III-Ⅴ. Through the establishment of an open engineering service platform, it also provides technical support for product, process, circuit analysis, wafer, finished product testing, and etc.

Products and Services:
8-inch Fabrication Platform

Designated for the development of“More than Moore”, the 8-inch fabrication platform in SITRI supports MEMS, AlN thin film process, silicon photonics, microfluidics, biophotonics and other “More than Moore”core technologies. It serves not only as an efficient R&D incubator but also a gateway to mass production.

Design Service Platform

SITRI focuses on MEMS sensors, Silicon photonics, IC design, RFFE, Memory, Power devices, SOI, Bio-optical electronic technology platforms, etc., It also renders Design & Modeling service, 8-inch Fabrication, PDK optimization, Packaging and Testing, Product design and IP landscaping. Taking advantage of low-cost, low-risk and high-value-added technical supports of “More than Moore” process platform, SITRI helps speed up product launches and technology iteration cycles.

Engineering Testing Platform

SITRI is equipped with advanced analysis and measurement tools, self-developed EDA software operated by an experienced international team. Through professional technical analysis and testing services, it provides other companies or research entities with electronic product analysis, process analysis, circuit analysis, MEMS wafer & technical support for finished product testing, IGBT module testing, and etc. In addition, SITRI is also specialized for other value-added services such as IP and industrial consulting.

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