MWS China 2021 Speaker
Prof. Guoqiang Wu
Dr. Guoqiang Wu is currently a Professor at Wuhan University. He received the Ph.D. degree in Microelectronics and Solid-State Electronics from the Shanghai Institute of Microsystem and Information Technology (SIMIT), Chinese Academy of Sciences, Shanghai, China, in 2013. His research interests include micro/nanoelectromechanical system (N/MEMS) design and integration, especially on MEMS resonators and piezoelectric sensors.
Aluminum Nitride-based Piezoelectric MEMS Resonators and Acoustic Sensors
Thin-film piezoelectric materials are gaining increasing importance in the MEMS industry. They offer opportunity to integrate thin film deposition in a MEMS or CMOS process. Aluminum nitride (AlN) is one of the most promising materials among the commonly used piezoelectric thin films. AlN-based bulk acoustic wave filters have demonstrated great commercial success. It has shown great potentials in the applications, from microphones to piezoelectric micromachined ultrasound transducers (PMUT), as well as thin film-based imaging device.
This talk briefly introduces the research activities on AlN-based piezoelectric MEMS resonators and acoustic sensors in our group at Wuhan University.
Wuhan University
Wuhan University (WHU) is a comprehensive and key national university directly under the administration of the Ministry of Education. It is also one of the “211 Project” and “985 Project” universities with full support in the construction and development from the central and local government of China.
Alex Gu
Coralie Gallis graduated as a PhD in Materials Sciences from Paris University and has an engineering degree in Physic-Chemistry. Coralie has worked for 20 years in the semiconductor field, holding various positions in different companies from software designer, Intelligent Specialist, Business Development and Strategic Partnerships. During her career, she developed the business for various domains such as BioMedical electronics, wearable electronics for healthcare, sport, wellness and Food industry. Since 2016, she is based in Silicon Valley, California and manages the Strategic Industrial Partnerships for the North American Market for CEAtech, a French technology research center.
Michelle M. Bourke received a B.Sc. degree in Optoelectronics and Laser Engineering from Heriot-Watt University, Edinburgh, Scotland, U.K., in 1993. Subsequently she joined the Defence Evaluation and Research Agency (DERA), where she worked on advanced processing methods for GaAs/AlGaAs optoelectronic devices. In 1997 Michelle moved to the semiconductor capital equipment industry as an etch process engineer. In 1999 she moved into Product Marketing where she has continued to develop her career. Today Michelle is with Lam Research Corporation as the Senior Strategic Marketing Director in the Customer Support Business Group.
Dr. Mary Ann Maher received her Ph.D. from Caltech in 1989 in the area of semiconductor device modeling. At Tanner Research she began the simulation and modeling group and launched Tanner’s T-Spice analog circuit simulator product. As Director of Advanced Products, she brought to market Tanner’s MEMS Pro microsystem and MCM Pro multi-chip module and packaging design tool. Moving to MEMSCAP, she became the company’s CTO and the General Manager and Executive Vice President of the Design Automation Business Unit. In 2004, she started SoftMEMS, LLC, the maker of the popular microsystems design tools – MEMS Pro and MEMS Xplorer, where she serves as CEO.
