MWS China 2021 Speaker
Prof. Zewen Liu
Prof. Dr. LIU Zewen received his BS degree in Physics from the University of Science and Technology (USTC), Hefei, China in 1983 and received his Ph.D degree in Microfabrication from the University of Paris-sud (Paris Saclay University), Paris, France in 1997. Then he joined Institute of Microelectronics at Tsinghua University (IMETU) and was the vice director of the IMETU. His research interests are MEMS, Nano Technologies and Integrated Sensors. He is one of the pioneers on RF MEMS and had engaged on RF MEMS devices and applications for more than 20 years. He is the invent published about 200 academic papers and is an inventor of more than 50 patents. He is also the author of two English Book Chapters in MEMS and Nanotechnology.
What We Learn From RF MEMS Development?
After a review of the historic development, the current status and market distribution of RF MEMS is analyzed. Then we focused on the RF MEMS switch and its potential applications. The main challenges of cantiliver/bridge type of RF MEMS is its long-term reliability. Possible solution is presented and we conclude that the industralization of RF MEMS switch is optimistic and irresistable.
SiMEMS
SiMEMS was incorporated in 2013, it’s a talented enterprise of science and technology in SIP, Suzhou, China. The company dedicated to RF MEMS products, including RF MEMS switches, phase shifters, attenuators. The core technology is a cooperation results from a RF MEMS research team in Tsinghua University. SiMEMS holds a first-class technical personnel team, and we have established extensive cooperation relationship with first-rate enterprise at home and abroad. SiMEMS has capability to provides a variety of RF MEMS products, which are low cost and high reliability for various applications in communication, transportation, space technology, instrumentation and consume electronics.
Alex Gu
Coralie Gallis graduated as a PhD in Materials Sciences from Paris University and has an engineering degree in Physic-Chemistry. Coralie has worked for 20 years in the semiconductor field, holding various positions in different companies from software designer, Intelligent Specialist, Business Development and Strategic Partnerships. During her career, she developed the business for various domains such as BioMedical electronics, wearable electronics for healthcare, sport, wellness and Food industry. Since 2016, she is based in Silicon Valley, California and manages the Strategic Industrial Partnerships for the North American Market for CEAtech, a French technology research center.
Michelle M. Bourke received a B.Sc. degree in Optoelectronics and Laser Engineering from Heriot-Watt University, Edinburgh, Scotland, U.K., in 1993. Subsequently she joined the Defence Evaluation and Research Agency (DERA), where she worked on advanced processing methods for GaAs/AlGaAs optoelectronic devices. In 1997 Michelle moved to the semiconductor capital equipment industry as an etch process engineer. In 1999 she moved into Product Marketing where she has continued to develop her career. Today Michelle is with Lam Research Corporation as the Senior Strategic Marketing Director in the Customer Support Business Group.
Dr. Mary Ann Maher received her Ph.D. from Caltech in 1989 in the area of semiconductor device modeling. At Tanner Research she began the simulation and modeling group and launched Tanner’s T-Spice analog circuit simulator product. As Director of Advanced Products, she brought to market Tanner’s MEMS Pro microsystem and MCM Pro multi-chip module and packaging design tool. Moving to MEMSCAP, she became the company’s CTO and the General Manager and Executive Vice President of the Design Automation Business Unit. In 2004, she started SoftMEMS, LLC, the maker of the popular microsystems design tools – MEMS Pro and MEMS Xplorer, where she serves as CEO.
