MWS China 2021 Speaker

Prof. Zewen Liu

  • SiMEMS
  • Founder and Chairman
  • Biography

Prof. Dr. LIU Zewen received his BS degree in Physics from the University of Science and Technology (USTC), Hefei, China in 1983 and received his Ph.D degree in Microfabrication from the University of Paris-sud (Paris Saclay University), Paris, France in 1997. Then he joined Institute of Microelectronics at Tsinghua University (IMETU) and was the vice director of the IMETU. His research interests are MEMS, Nano Technologies and Integrated Sensors. He is one of the pioneers on RF MEMS and had engaged on RF MEMS devices and applications for more than 20 years. He is the invent published about 200 academic papers and is an inventor of more than 50 patents. He is also the author of two English Book Chapters in MEMS and Nanotechnology.

  • Presentation

What We Learn From RF MEMS Development?

After a review of the historic development, the current status and market distribution of RF MEMS is analyzed. Then we focused on the RF MEMS switch and its potential applications. The main challenges of cantiliver/bridge type of RF MEMS is its long-term reliability. Possible solution is presented and we conclude that the industralization of RF MEMS switch is optimistic and irresistable.

SiMEMS logo
  • Company Profile


SiMEMS was incorporated in 2013, it’s a talented enterprise of science and technology in SIP, Suzhou, China. The company dedicated to RF MEMS products, including RF MEMS switches, phase shifters, attenuators. The core technology is a cooperation results from a RF MEMS research team in Tsinghua University. SiMEMS holds a first-class technical personnel team, and we have established extensive cooperation relationship with first-rate enterprise at home and abroad. SiMEMS has capability to provides a variety of RF MEMS products, which are low cost and high reliability for various applications in communication, transportation, space technology, instrumentation and consume electronics.

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