Prof. Dr. LIU Zewen received his BS degree in Physics from the University of Science and Technology (USTC), Hefei, China in 1983 and received his Ph.D degree in Microfabrication from the University of Paris-sud (Paris Saclay University), Paris, France in 1997. Then he joined Institute of Microelectronics at Tsinghua University (IMETU) and was the vice director of the IMETU. His research interests are MEMS, Nano Technologies and Integrated Sensors. He is one of the pioneers on RF MEMS and had engaged on RF MEMS devices and applications for more than 20 years. He is the invent published about 200 academic papers and is an inventor of more than 50 patents. He is also the author of two English Book Chapters in MEMS and Nanotechnology.
RF MEMS: 现状与展望
在简短回顾了射频MEMS历史发展以后，给出了其现状及市场分析。 然后我们重点研究了rfmems开关及其潜在应用。 悬臂梁/桥式rfmems开关的主要挑战是其长期可靠性的关键。 提出了可能的解决方案，我们的结论是RFMEMS开关工业化的前景是乐观的，也是不可阻挡的。
公司成立于2013年，是中国苏州工业园区的一家科技人才密集型企业。 本公司致力于RF MEMS产品，包括RF MEMS开关、移相器、 移相器、衰减器。核心技术是清华大学RF MEMS研究团队的合作成果。 公司拥有一流的技术人才队伍，与国内外一流企业建立了广泛的合作关系。 SiMEMS能够为通信、交通、空间技术、仪器仪表和消费电子等领域的各种应用提供低成本、高可靠性的rfmems产品。