
2022 世界微机电系统欧洲峰会讲师
Dr. Koukou Suu
Dr. Koukou Suu is Executive Officer and Senior Fellow of ULVAC, Inc., and also President and CEO of ULVAC Technologies, Inc. since 2019. He was the General Manager of Global Market and Technology Strategy Division from 2014 to 2019. Prior to this, He served as the General Manager of Institute of Semiconductor and Electronics Technologies from 2008 to 2014. At the Institute of Semiconductor and Electronics Technologies, he worked on Ferroelectric MEMS technologies, emerging non-volatile memories, high-K capacitors, LED, power devices, thin-film Li-battery as well as 3D packaging manufacturing technologies.
ULVAC Piezo-MEMS Solution Technology
Piezoelectric thin films have been integrated with advanced silicon-based microfabrication methods in the formation of both sensors and actuators such as gyro/acceleration sensor, microphone, piezoelectric micro-machined ultrasonic transducer (pMUT), micro-actuator and Film Bulk Acoustic Resonator (FBAR). These films have become recognized as key enabling technologies for “Smartphones”, “Wearable devices” and “Autonomous car” which are becoming one of the most important parts of the “Smart infrastructure” of a modern “Smart Society”. ULVAC will introduce the newly developed mass production technology for Piezo-MEMS.

ULVAC
ULVAC GmbH which was established in 1987 as the European subsidiary of ULVAC, Inc. headquartered in Munich, Germany. ULVAC’s solutions diversely incorporate equipment, materials, and services for Semiconductors, MEMS, Flat Panel Displays, Electronic Components, PCB, TFB, and other Vacuum Equipment for the European Markets.
ULVAC is the global leader for thin film PZT deposition and etch.
ULVAC GmbH
Klausnerring 4
85551 Kirchheim b. München
Germany
Fon: +49 – 89 – 96 09 09 – 0
Fax: +49 – 89 – 96 09 09 – 96
Email:
http://www.ulvac.eu
————————————————-
ULVAC Product Information
For MEMS application ULVAC has developed systems dedicated to MEMS sensors, actuators, switches, lab-on-chip and micromirror manufacturing. This equipment range includes sputtering and etching for piezo electric materials like PZT, AlN and ScAlN, glass and metal etching, thick resist ashing, resist and polymer removal within trench structures, and others.
Piezoelectric materials can be used to further miniaturize a range of devices, including inertial sensors, tuneable RF devices, inkjet print heads, micromirrors, microphones, autofocus lenses and others. The integration of thin film deposition directly on CMOS-processed wafers is key for highly-integrated devices. ULVAC has developed high-volume processing sputtering method that allows sub 500°C processing temperatures, is configured to pole the piezoelectric crystals during the deposition process and is compatible with other CMOS processes.
2022 世界微机电系统欧洲峰会讲师

Dr. Zhu Yao
Deputy Head – Sensors, Actuators & Microsystems Department – Institute of Microelectronics (IME)
A*STAR (Agency for Science, Technology and Research), Singapore

Ari Kuukkala
General Manager
AEM Afore Oy

Pat Walsh
Managing Director
AMEC

Stefan Martens
Senior Director, MEMS and Sensor Products
安靠科技

José Silva
VP of Operations & R&D Amkor Portugal
安靠科技

Gopal Prabhu
Senior Director of Technology Programs
Applied Materials

Tristan Rousselle
Founder & Deputy CEO
Aryballe

Dr. Ando Feyh
MEMS Strategy Management, New Business and M&A
Bosch

Nigel Beddoe
Director Product Marketing Management
Cohu, Inc

Michele Palmieri
VP Micro & Nano Systems Division
CSEM

Lucilla Sioli
Director Artificial Intelligence and Digital Industry
European Commission

Samira Nik
Programme Manager – Quantum Technologies and Electronics
European Innovation Council and SMEs Agency (EC EISMEA)

Maurus Tschirky
Senior Product Marketing Manager
Evatec AG

Dr. Andrea De Luca
CEO & Co-Founder
Flusso

Thomas Zarbock
Division Director - MEMS Engineering, Manufacturing & Test
Fraunhofer IPMS

Dr. Véronique Rochus
Principal Scientist, Multi-Physics Microsystems Developments
Imec

Laurent Remont
VP Sensor Systems
Infineon Technologies AG

John S. McKillop, Ph.D.
Senior Director Sensor Technology
NXP

Dr. Wei Zhao
Strategic Marketing Director
Onto Innovation

Dr. Stephan Marauska
COO
OQMented

Corrado Rocca
R&D Head, Cyber Unit
PIRELLI Tyre

Dr. Mohssen Moridi
Head of Research Division Microsystems
SAL

Dr. Steve Stoffels
首席技术官
Pulsify Medical

Dr. Mustafa Badaroglu
Principal Engineer/Architect (& IRDS More Moore Global Chair)
Qualcomm

Paul Pickering
Managing Director
Silicon Catalyst

Ingolf Leidert
Product Manager Device Testing
SPEKTRA

Farrokh Ayazi
Founder & CEO
StethX Microsystems

Valentina Baiardo
MEMS Sub-Group Director
STMicroelectronics

Andrea Onetti
EVP, MEMS Sub-Group - Analog, MEMS and Sensors Group
STMicroelectronics

Anton Hofmeister
Group VP & General Manager R&D and Strategy for the Analog and MEMS Sub-Groups
STMicroelectronics

Jeffrey Krotosky
CTO & Director of New Product Introduction for TDK-Tronics
TDK

Collin Twanow
Director Technology
Teledyne

Andrea Rusconi
Co-founder & CTO
Usound

Matthew Crowley
President and CEO
Vesper Technologies

朱守经
音频专家,器件负责人
北京小米移动有限软件公司

Dimitrios Damianos
Senior Technology & Market Analyst
Yole Intelligence part of Yole Group