Dr. Zhu Yao
Deputy Head – Sensors, Actuators & Microsystems Department – Institute of Microelectronics (IME)
A*STAR (Agency for Science, Technology and Research), Singapore
Dr. Véronique Rochus (born 1978), received her M.S. degree in Physics Engineering from University of Liège in 2001 and a D.E.A. on “Nanostructures et Microsystèmes pour l’électronique et les communications“ at the University of “Paris-Sud” in 2002. She received her PhD in Applied Science from University of Liège in 2006 and then worked on MEMS modelling as postdoctoral researcher financed by Belgian National Fund for Scientific Research until 2010. During that period she performed postdoc stays at TU Delft as well as at Kyoto University. Afterwards she joined the Interuniversity MicroElectronics Center (IMEC) in 2010 where she is now Principal Member of Technical Staff and where he actively contributes to the research in the field of MEMS design and characterization.
This presentation will introduce novel developments of wave-based sensors and actuators enabling phononic (micro-acoustic) and photonic (nano-optical) platforms ported from silicon wafer processes to glass panel processes. In particular, we will present extremely sensitive opto-mechanical sensors handling parallel read-out for electronic skin as well as piezo-electric micromachined ultrasound technologies enabling gesture recognition, emotion monitoring and mid-air non-contact haptic feedback.
Imec is a world-leading research and innovation center in nanoelectronics and digital technologies. Imec leverages its state-of-the-art R&D infrastructure and its team of more than 5,000 employees and top researchers, for R&D in advanced semiconductor and system scaling, silicon photonics, artificial intelligence, beyond 5G communications and sensing technologies, and in application domains such as health and life sciences, mobility, industry 4.0, agrofood, smart cities, sustainable energy, education, … Imec unites world-industry leaders across the semiconductor value chain, Flanders-based and international tech, pharma, medical and ICT companies, start-ups, and academia and knowledge centers. Imec is headquartered in Leuven (Belgium), and has research sites across Belgium, in the Netherlands, and the USA, and offices in China, India, Taiwan and Japan.
Address imec Leuven (Headquarters)
Remisebosweg 1
3001 Leuven
Belgium
Phone: +32 16 28 12 11
Website: Imec R&D, nano electronics and digital technologies (imec-int.com)
Deputy Head – Sensors, Actuators & Microsystems Department – Institute of Microelectronics (IME)
A*STAR (Agency for Science, Technology and Research), Singapore
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