Dr. Wei Zhao

Wei Zhao is a strategic marketing director of specialty devices at Onto Innovation. The device segments Wei covers range from MEMS to sensors, power, compounds, analog, IoT and others. Wei has served as a process engineer, integration leader and fab equipment strategist in support of semiconductor technology growth. Wei began his career in advanced logic and gained hands-on fab process module and integration experience in both planar and FinFET logic technology. With an ever-expanding knowledge of specialty device technologies as an equipment strategist, Wei has collaborated with fab process partners in specialty device segments to jointly develop equipment products that enable device performance growth. Here at Onto Innovation, he is focused on extending our company’s broad portfolio of metrology, inspection and lithography products to support the specialty device market, making semiconductor manufacturing greener, more productive and more innovative. Wei holds a B.S. and M.S. in Engineering Mechanics from the Dalian University of Technology and earned his Ph.D. in Mechanical Engineering at Stony Brook University.

Process control solutions enabling high performance and efficient MEMS manufacturing

Onto Innovation is a leading supplier of metrology and inspection solutions for advanced semiconductor manufacturing. This presentation will highlight several use cases and key product technologies used to improve process control and enable high volume manufacturing of MEMS devices. Some process control hardware/software solutions include inline metrology, 3D geometry, inspection and closed loop software for increased RF filter device performance and yield; Inspection and process control in microphone manufacturing; and high throughput inspection of BiCMOS circuitry and MEMS in accelerometers and gyroscopes.