Ingolf Leidert

Ingolf Leidert is Product Manager Device Testing at SPEKTRA GmbH Dresden, with prior Product Marketing and Application Engineering positions at Atmel Corporation and Advanced Micro Devices. He holds a Bachelor’s degree in Communications Engineering and has over 20 years’ experience in the semiconductor industry. Throughout his career he has worked on various wired and wireless sensor applications and knows the supplier and the customer perspective. At SPEKTRA he is working on efficient sensor testing solutions that help improving MEMS sensor reliability and robustness.

Pushing the boundaries of MEMS/NEMS inertial sensor testing: Ultrahigh frequency vibration – test system.

MEMS technologies have led to an amazing variety of consumer and automotive sensor products and we are surrounded by billions of them already. More and more of these sensors have a critical impact to our everyday lives – so it becomes even more essential to develop and use advanced and thorough testing procedures for these sensors. As technology advancements might also introduce first NEMS based inertial sensors quiet soon there is already a growing demand for test equipment that allows frequency stimulus way beyond the usual limits. A key field for inertial sensor test systems is the analysis of the sensors frequency response and sensitivity in the specified range. But it is equally important to verify the sensors response to unwanted external stimulus to develop more robust sensor designs.

In this speech a novel excitation system for inertial sensors will be presented that allows linear and rotational excitation of inertial MEMS/NEMS sensors and can deliver controlled vibration excitation frequencies of more than 2 MHz This test system is tailored to be used in sensor design laboratories during sensor prototype characterization and it enables sensor designers to verify operational performance as well as immunity to HF induced disturbances of next generation inertial sensors. In the presentation all procedures and limitations for the regular lab usage of such special vibration and rotation exciter will be described.