2022 世界微机电系统欧洲峰会讲师

Maurus Tschirky

Evatec AG
Senior Product Marketing Manager

简介

Maurus Tschirky is Senior Product Marketing Manager at Evatec. He is globally responsible for the market segment MEMS in terms of strategy and strategic project and customer acquisition. His genuine interest in advanced functional materials with piezoelectric and magnetic properties emphasize his dedication to the MEMS and Sensors market in particular. Maurus had a number of positions in the PVD-equipment industry (Balzers, Unaxis, Oerlikon and now Evatec) ranging from Application Engineer, System Engineer, Project Manager to Product Manager over the years and also spent 3 years leading a research section at CSEM in Neuchatel, Switzerland. He has a first Degree in Control Electronics from the University of Applied Sciences in Buchs, followed by a Masters in Business Engineering / International Marketing from the Hochschule für Wirtschaft und Technik in Zurich, Switzerland.

演讲内容

EVATEC – Thin film Production Solutions for Heterogeneous and Monolithic integration

At the heart of today’s MEMS challenges is the Integration of Various Technologies into a device or package. Expertise in one single aspect is no longer good enough. Active piezoelectric sensing or actuating elements meet heat dissipation layers, antireflective coatings, magnetic shielding or stress compensations – all integrated in one device. Supporting manufacturers with a variety of deposition technologies such as PVD, PECVD and PEALD alongside tool concepts (batch, single wafer or inline) enables the realization of specific combinations for the future. This is where Photonics, Optoelectronics, Semiconductors and Advanced Packaging come together – forming today’s MEMS.

公司简介

Evatec AG

Evatec delivers complete thin film deposition solutions in Advanced Packaging, Semiconductor, Optoelectronics and Photonics – from UBM /RDL processes in FOWLP and FOPLP applications, to deposition of high performance piezoelectrics like AlScN for 5G networks or NIR bandpass filters for 3D sensing, face and gesture recognition in our smart devices. We deliver tailored production solutions with batch, cluster or inline architecture according to your substrate format, throughput, process and fab integration requirements. Evatec’s Advanced Process Control (APC) technologies set new standards in deposition through ‘in situ” capability for control of film properties during the deposition cycle. Reduce your process development times, enhance repeatability and yields or increase tool throughput.